JPH065615Y2 - スタンパ保持装置 - Google Patents
スタンパ保持装置Info
- Publication number
- JPH065615Y2 JPH065615Y2 JP1987172682U JP17268287U JPH065615Y2 JP H065615 Y2 JPH065615 Y2 JP H065615Y2 JP 1987172682 U JP1987172682 U JP 1987172682U JP 17268287 U JP17268287 U JP 17268287U JP H065615 Y2 JPH065615 Y2 JP H065615Y2
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- decompression chamber
- rotary table
- table body
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006837 decompression Effects 0.000 claims description 36
- 239000013013 elastic material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Coating Apparatus (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987172682U JPH065615Y2 (ja) | 1987-11-13 | 1987-11-13 | スタンパ保持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987172682U JPH065615Y2 (ja) | 1987-11-13 | 1987-11-13 | スタンパ保持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0178321U JPH0178321U (en]) | 1989-05-26 |
JPH065615Y2 true JPH065615Y2 (ja) | 1994-02-09 |
Family
ID=31464639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987172682U Expired - Lifetime JPH065615Y2 (ja) | 1987-11-13 | 1987-11-13 | スタンパ保持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH065615Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2564984Y2 (ja) * | 1990-07-28 | 1998-03-11 | 日本電気ホームエレクトロニクス株式会社 | 円板状記録媒体製造用マスク装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62142617A (ja) * | 1985-12-18 | 1987-06-26 | Nikka Eng Kk | デイスク製造装置 |
-
1987
- 1987-11-13 JP JP1987172682U patent/JPH065615Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0178321U (en]) | 1989-05-26 |
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